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Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer

Authors :
张善文 Zhang Shan-wen
于海利 Yu Hai-li
卢禹先 Lu Yuxian
姜珊 Jiang Shan
尹禄 Yin Lu
齐向东 Qi Xiangdong
李晓天 Li Xiaotian
Source :
Chinese Journal of Lasers. 43:0508005
Publication Year :
2016
Publisher :
Shanghai Institute of Optics and Fine Mechanics, 2016.

Details

ISSN :
02587025
Volume :
43
Database :
OpenAIRE
Journal :
Chinese Journal of Lasers
Accession number :
edsair.doi...........2e994a5216b31c0e2871dc35f6e096e0