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Precision Analysis of Grating Replicated Mosaic Error Based on the Principle of Fraunhofer
- Source :
- Chinese Journal of Lasers. 43:0508005
- Publication Year :
- 2016
- Publisher :
- Shanghai Institute of Optics and Fine Mechanics, 2016.
Details
- ISSN :
- 02587025
- Volume :
- 43
- Database :
- OpenAIRE
- Journal :
- Chinese Journal of Lasers
- Accession number :
- edsair.doi...........2e994a5216b31c0e2871dc35f6e096e0