Depth profiling of hydrogen in solids by elastic recoil detection with 19 f ions

Authors :: Zhu Peiran
Feng Ai-Guo
Liu Jiarui
Li Da-Wan
Source :: Chinese Physics Letters. 4:249-252
Publication Year :: 1987
Publisher :: IOP Publishing, 1987.
Abstract: The hydrogen depth profiling in solids has been done by elastic recoil detection (ERD) technique with multicharged 19F ion beam from a small Tandem Accelerator of 2×1.7MV. Details of the experimental technique are described. The depth resolution of about 230A in the near-surface regions (similar 5000A) is much better than that of ERD technique with 2.5MeV He beam and heavy ion beam of 30MeV.

Subjects :: Elastic recoil detection
Materials science
Heavy ion beam
Ion beam deposition
Ion beam
Hydrogen
chemistry
Physics::Accelerator Physics
General Physics and Astronomy
chemistry.chemical_element
Atomic physics
Tandem accelerator
Ion

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