Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers

MLA

Y.S. Lu, et al. Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers. May 2007. EBSCOhost, https://doi.org/10.4028/0-87849-430-8.263.

APA

Y.S. Lu, Yasuhiro Tani, K. Soutome, & Y. Kamimura. (2007). Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers. https://doi.org/10.4028/0-87849-430-8.263

Chicago

Y.S. Lu, Yasuhiro Tani, K. Soutome, and Y. Kamimura. 2007. “Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers,” May. doi:10.4028/0-87849-430-8.263.