Measurement of MEMS Actuator Deflection by C-V Method

Authors :: Satish K Verma
Bhaskar Mitra
Source :: 2022 IEEE International Conference on Emerging Electronics (ICEE).
Publication Year :: 2022
Publisher :: IEEE, 2022.

Database :: OpenAIRE
Journal :: 2022 IEEE International Conference on Emerging Electronics (ICEE)
Accession number :: edsair.doi...........2ff4329b2258287274dc0f8182252da6
Full Text :: https://doi.org/10.1109/icee56203.2022.10118163

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