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High-precision method for gauge block measurements and comparison of gauge block interferometers

Authors :
C. A. Massone
I. Malinovsky
A. Titov
Source :
1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254).
Publication Year :
2002
Publisher :
IEEE, 2002.

Abstract

A precise method, intended for nanometer accuracy in gauge block length measurements, has been realized. Results of the measurements are corrected on distortions in interferometer optics and are not affected by the quality of wringing and deformation of the reference plate. Accuracy limitations of the conventional method are outlined.

Details

Database :
OpenAIRE
Journal :
1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254)
Accession number :
edsair.doi...........3023a0d234a3bc57baa2bb5a0f370fc0
Full Text :
https://doi.org/10.1109/cpem.1998.699770