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High-precision method for gauge block measurements and comparison of gauge block interferometers
- Source :
- 1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- A precise method, intended for nanometer accuracy in gauge block length measurements, has been realized. Results of the measurements are corrected on distortions in interferometer optics and are not affected by the quality of wringing and deformation of the reference plate. Accuracy limitations of the conventional method are outlined.
Details
- Database :
- OpenAIRE
- Journal :
- 1998 Conference on Precision Electromagnetic Measurements Digest (Cat. No.98CH36254)
- Accession number :
- edsair.doi...........3023a0d234a3bc57baa2bb5a0f370fc0
- Full Text :
- https://doi.org/10.1109/cpem.1998.699770