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Excimer Laser Annealing of Ion-Implanted 6H-Silicon Carbide
- Source :
- Materials Science Forum. :873-876
- Publication Year :
- 2000
- Publisher :
- Trans Tech Publications, Ltd., 2000.
- Subjects :
- Materials science
Excimer laser
business.industry
Mechanical Engineering
medicine.medical_treatment
Analytical chemistry
Condensed Matter Physics
Ion
Laser annealing
chemistry.chemical_compound
Ion implantation
chemistry
Mechanics of Materials
Electrical resistivity and conductivity
medicine
Silicon carbide
Optoelectronics
General Materials Science
business
Excimer laser annealing
Subjects
Details
- ISSN :
- 16629752
- Database :
- OpenAIRE
- Journal :
- Materials Science Forum
- Accession number :
- edsair.doi...........3024ea91af6e4d08845762038deae4be