Material Characterization of Metal Germanide Gate Electrodes Formed by Fully Germanided Gate Process

MLA

Masato Koyama, et al. “Material Characterization of Metal Germanide Gate Electrodes Formed by Fully Germanided Gate Process.” Japanese Journal of Applied Physics, vol. 45, Apr. 2006, pp. 2925–32. EBSCOhost, https://doi.org/10.1143/jjap.45.2925.

APA

Masato Koyama, Akira Nishiyama, Junji Koga, & Yoshinori Tsuchiya. (2006). Material Characterization of Metal Germanide Gate Electrodes Formed by Fully Germanided Gate Process. Japanese Journal of Applied Physics, 45, 2925–2932. https://doi.org/10.1143/jjap.45.2925

Chicago

Masato Koyama, Akira Nishiyama, Junji Koga, and Yoshinori Tsuchiya. 2006. “Material Characterization of Metal Germanide Gate Electrodes Formed by Fully Germanided Gate Process.” Japanese Journal of Applied Physics 45 (April): 2925–32. doi:10.1143/jjap.45.2925.