Glass surface treatment with excimer and CO2 lasers

Laser techniques were used for ablation and surface modification of glass. The experiments were carried out using a 50 W CO 2 laser (10.6 μm) and a 40 W 2J/20 Hz XeCl excimer laser (308 nm). The IR radiation heats the sample surface locally. Lead glass was polished and vitreous silica was engraved. High power UV radiation causes ablation of glass with negligible thermal effects. This phenomenon is discussed on the basis of a photochemical mechanism. Removal rates of various glasses were determined.