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Coupled UHF Micromechanical Ring Resonators With Schottky Transducers
- Source :
- Journal of Microelectromechanical Systems. 26:740-742
- Publication Year :
- 2017
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2017.
-
Abstract
- In this letter, we present ultra-high frequency coupled ring resonators realized in a suspended AlGaN/GaN heterostructure. The piezoelectric transducers consist of back-to-back nickel (Ni) Schottky diodes deposited on a 20-nm-thick AlGaN layer and a floating 2-D electron gas (2-DEG) sheet at the AlGaN/GaN interface. The dispersion characteristics of symmetric and anti-symmetric Lamb waves in ring resonators are characterized. Higher order resonance harmonics are targeted with very high mechanical quality factors ( $Q\text{s}$ ) through optimized design of the coupling beam. Such a scheme minimizes the acoustic energy leakage to the substrate, and thus increases anchor $Q$ . We report on a high-order breathing resonance mode at 900.7 MHz with very high mechanical $Q$ of 8350 measured at room temperature and ambient pressure, achieving a record high frequency $\times Q$ value of $7.5\times 10^{12}$ . [2017-0064]
- Subjects :
- 010302 applied physics
Materials science
business.industry
Mechanical Engineering
Wide-bandgap semiconductor
Optical ring resonators
Schottky diode
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Piezoelectricity
law.invention
Resonator
Lamb waves
law
0103 physical sciences
Optoelectronics
Electrical and Electronic Engineering
0210 nano-technology
business
Coupling coefficient of resonators
Leakage (electronics)
Subjects
Details
- ISSN :
- 19410158 and 10577157
- Volume :
- 26
- Database :
- OpenAIRE
- Journal :
- Journal of Microelectromechanical Systems
- Accession number :
- edsair.doi...........3137a14432161cc07a5cd654cc164b14