Modeling the Sensitive Element of the Sandwich Construction of a Capacitive Micromechanical Accelerometer, Taking into Account the Change in the Dielectric Constant

Subjects

Subjects :

Materials Chemistry
Electrical and Electronic Engineering
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :

16083415 and 10637397

Volume :

50

Database :

OpenAIRE

Journal :

Russian Microelectronics

Accession number :

edsair.doi...........32626c41bbbd81075e167ca7aa7e17b8

Full Text :

https://doi.org/10.1134/s1063739721070027