Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input

Subjects

Subjects :

Biomaterials
Metals and Alloys
Ceramics and Composites
Surfaces, Coatings and Films

Details

ISSN :

22387854

Volume :

24

Database :

OpenAIRE

Journal :

Journal of Materials Research and Technology

Accession number :

edsair.doi...........32fcdd9c3a83afca76731b2450ed734d

Full Text :

https://doi.org/10.1016/j.jmrt.2023.03.229