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Probe design of nanometer measuring machine based on grating strain sensor

Authors :
Zhang Jiayan
Feng Xugang
Du Cuicui
Source :
Journal of Applied Optics. 38:628-632
Publication Year :
2017
Publisher :
Journal of Applied Optics, 2017.

Subjects

Subjects :
Materials science
business.industry
Optoelectronics
Nanometre
Strain sensor
Grating
business
Atomic and Molecular Physics, and Optics

Details

ISSN :
10022082
Volume :
38
Database :
OpenAIRE
Journal :
Journal of Applied Optics
Accession number :
edsair.doi...........33dbbde973291e14168409fc4d69402b
Full Text :
https://doi.org/10.5768/jao201738.0308001
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