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Laser-Induced Backside Wet Etching: Laser Ablation of Dye Solutions for Surface Micro-Structuring of Silica Glasses

Authors :
Aiko Narazaki
Yoshizo Kawaguchi
Tadatake Sato
Hiroyuki Niino
Ryozo Kurosaki
Source :
The Review of Laser Engineering. 36:108-109
Publication Year :
2008
Publisher :
Laser Society of Japan, 2008.

Subjects

Subjects :
Laser ablation
Optics
Materials science
Silica glass
business.industry
law
Optoelectronics
Micro structuring
Dry etching
Reactive-ion etching
business
Laser
law.invention

Details

ISSN :
13496603 and 03870200
Volume :
36
Database :
OpenAIRE
Journal :
The Review of Laser Engineering
Accession number :
edsair.doi...........33f89042a40cd0eb429b70910e8f667f

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