An opto-electronic multi-chip module for chip-level optical interconnects

We have integrated an 850-nm VCSEL, its driver, and diffractive lenslet array onto a single substrate to produce an integrated opto-electronic multi-chip module. The diffractive element fans the output from the VCSEL into an array of approximately 60 focal spots at a plane 1416 µm from the surface of the VCSEL. Experimental results are presented.