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Precision Microfabrication of Hard Materials by Hybrid Laser Processing

Authors :
Koji Sugioka
Jie Zhang
Katsumi Midorikawa
Source :
The Review of Laser Engineering. 28:98-102
Publication Year :
2000
Publisher :
Laser Society of Japan, 2000.

Subjects

Subjects :
Materials science
business.industry
Optoelectronics
business
Laser processing
Microfabrication

Details

ISSN :
13496603 and 03870200
Volume :
28
Database :
OpenAIRE
Journal :
The Review of Laser Engineering
Accession number :
edsair.doi...........3495aaf29d2899557d461c2d0be44ead

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