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Low-voltage field emitter array cathode for high frequency applications

Authors :
J. K. Cochran
D. N. Hill
W. B. Carter
R. K. Feeney
W. L. Ohlinger
H. M. Harris
Source :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:1297
Publication Year :
1993
Publisher :
American Vacuum Society, 1993.

Abstract

The composite‐based low voltage field emitter cathode offers distinct advantages for high‐frequency applications. It is based on a directionally solidified ZrO2⋅Y2O3–W eutectic composite containing aligned, single‐crystal tungsten fibers, ≊500 nm in diameter, with spatial densities of 2–50×106/cm2. The composite can be etched to form fibers of virtually any length with tip radii of 5–10 nm. A gridded structure can be formed around the fibers using a line‐of‐sight vapor deposition process. Because of the thickness of the composite chips used as the substrate (0.5 mm) and the high resistivity of the oxide matrix, the insulator film can be made extremely thin, thereby reducing the extractor aperture radius. Emission tests have verified this configuration results in measurably higher field enhancement values for the arrays.

Details

ISSN :
0734211X
Volume :
11
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Accession number :
edsair.doi...........35c537e7fee332d8cf404ae5320597f4
Full Text :
https://doi.org/10.1116/1.586932