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Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices
- Source :
- Unconventional Nanopatterning Techniques and Applications
- Publication Year :
- 2008
- Publisher :
- John Wiley & Sons, Inc., 2008.
Details
- Database :
- OpenAIRE
- Journal :
- Unconventional Nanopatterning Techniques and Applications
- Accession number :
- edsair.doi...........37f2f20764f309428836baa319170a89