Soft Lithography for Microfluidic Microelectromechanical Systems (MEMS) and Optical Devices

Authors :: Matthew E. Stewart
Svetlana M. Mitrovski
Evan M. Erickson
Shraddha Avasthy
Ralph G. Nuzzo
John A. Rogers
Source :: Unconventional Nanopatterning Techniques and Applications
Publication Year :: 2008
Publisher :: John Wiley & Sons, Inc., 2008.

Subjects :: Microelectromechanical systems
Materials science
Microfluidics
Nanotechnology
Soft lithography

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