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Temperature rise effects on static characteristics of complementary FETs with Si and Ge nanosheets

Authors :
Junichi Hattori
Koichi Fukuda
Tsutomu Ikegami
Wen Hsin Chang
Source :
Japanese Journal of Applied Physics. 62:SC1025
Publication Year :
2023
Publisher :
IOP Publishing, 2023.

Abstract

We simulate the static behavior of Ge-p/Si-n nanosheet complementary FETs (CFETs), where p-type FETs containing Ge nanosheet channels are stacked on top of n-type FETs containing Si nanosheet channels, and we investigate its relation to temperature while comparing it with that of Si-p/Si-n nanosheet CFETs, whose p-type FETs contain Si nanosheet channels. It is found that temperature rise has similar effects on the static characteristics of the two CFETs operating as inverters, although the variations in threshold voltage and noise margin with rising temperature are slightly smaller in the Ge-p/Si-n CFET inverter than in the Si-p/Si-n CFET inverter. The temperature rise effects are fully explained by the temperature dependence of material and carrier properties of Ge and Si.

Details

ISSN :
13474065 and 00214922
Volume :
62
Database :
OpenAIRE
Journal :
Japanese Journal of Applied Physics
Accession number :
edsair.doi...........386261656d96289f72cef12b3a8259f8
Full Text :
https://doi.org/10.35848/1347-4065/acae61