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Fabrication of polymer microneedle array based on tungsten mold and optimized replication method
- Source :
- 2018 IEEE Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2018
- Publisher :
- IEEE, 2018.
-
Abstract
- Fabrication of high performance tungsten microneedle array (MNA) which has tunable height and diameter is reported for the first time. Further, stable replication of cycloolefine copolymer (COC) MNA is achieved using novel vacuum isostatic hot embossing followed by PDMS casting with tungsten MNA mold. Radius of needlepoint is less than 1pm while microneedle height reaches as high as 100μm. High hardness of tungsten ensures reliability of mold which offers commercial potential for this method.
- Subjects :
- 010302 applied physics
chemistry.chemical_classification
Fabrication
Materials science
Scanning electron microscope
chemistry.chemical_element
02 engineering and technology
Polymer
Tungsten
021001 nanoscience & nanotechnology
medicine.disease_cause
01 natural sciences
Casting
chemistry
Etching (microfabrication)
Mold
0103 physical sciences
medicine
Composite material
0210 nano-technology
Embossing
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2018 IEEE Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........38c146ad1c907983bdc7988a749d89fd