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Fabrication of polymer microneedle array based on tungsten mold and optimized replication method

Authors :
Xuanyang Li
Jing Chen
Yanming Xia
Lu Song
Shenglin Ma
Source :
2018 IEEE Micro Electro Mechanical Systems (MEMS).
Publication Year :
2018
Publisher :
IEEE, 2018.

Abstract

Fabrication of high performance tungsten microneedle array (MNA) which has tunable height and diameter is reported for the first time. Further, stable replication of cycloolefine copolymer (COC) MNA is achieved using novel vacuum isostatic hot embossing followed by PDMS casting with tungsten MNA mold. Radius of needlepoint is less than 1pm while microneedle height reaches as high as 100μm. High hardness of tungsten ensures reliability of mold which offers commercial potential for this method.

Details

Database :
OpenAIRE
Journal :
2018 IEEE Micro Electro Mechanical Systems (MEMS)
Accession number :
edsair.doi...........38c146ad1c907983bdc7988a749d89fd