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Compact electron beam focusing column

Authors :
Arun Persaud
Jani Reijonen
Ka-Ngo Leung
Source :
SPIE Proceedings.
Publication Year :
2001
Publisher :
SPIE, 2001.

Abstract

A novel design for an electron beam focusing column has been developed at LBNL. The design is based on a low-energy spread multicusp plasma source which is used as a cathode for electron beam production. The focusing column is 10 mm in length. The electron beam is focused by means of electrostatic fields. The column is designed for a maximum voltage of 50 kV. Simulations of the electron trajectories have been performed by using the 2-D simulation code IGUN and EGUN. The electron temperature has also been incorporated into the simulations. The electron beam simulations, column design and fabrication will be discussed in this presentation.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........390974bf4888390ceac566a2c89b6618
Full Text :
https://doi.org/10.1117/12.451269