Mode-Matched Multi-Ring Disk Resonator Using (100) Single Crystal Silicon

Authors :: Shihe Wang
Jianlin Chen
Takashiro Tsukamoto
Shuji Tanaka
Source :: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Publication Year :: 2022
Publisher :: IEEE, 2022.

Database :: OpenAIRE
Journal :: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Accession number :: edsair.doi...........3a35252bf95cbb8136b00510bdad1ab2
Full Text :: https://doi.org/10.1109/mems51670.2022.9699445