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A MEMS Microvalve Array For Gas Flow Control

Authors :
M. Bulut Coskun
Cecile Jung-Kubiak
Sofia Rahiminejad
Risaku Toda
Abhijit Shevade
Matthew Dickie
John Gill
Mina Rais-Zadeh
Source :
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Publication Year :
2022
Publisher :
IEEE, 2022.

Details

Database :
OpenAIRE
Journal :
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Accession number :
edsair.doi...........3b079aeeee3e3cb635909333bb128801

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