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A MEMS Microvalve Array For Gas Flow Control
- Source :
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
- Publication Year :
- 2022
- Publisher :
- IEEE, 2022.
Details
- Database :
- OpenAIRE
- Journal :
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
- Accession number :
- edsair.doi...........3b079aeeee3e3cb635909333bb128801