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Development of a long trace profiler at SPring-8 using a newly developed slope sensor

Authors :
Yasunori Senba
Haruhiko Ohashi
Hikaru Kishimoto
Takanori Miura
Source :
SPIE Proceedings.
Publication Year :
2016
Publisher :
SPIE, 2016.

Abstract

The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been performed, and a spatial resolution of 0.6 mm has been confirmed.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........3b4221575b4ab1680f731c3edf930a41