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Development of a long trace profiler at SPring-8 using a newly developed slope sensor
- Source :
- SPIE Proceedings.
- Publication Year :
- 2016
- Publisher :
- SPIE, 2016.
-
Abstract
- The long trace profiler (LTP) at SPring-8 has been upgraded using a newly developed laser-based slope sensor for precise measurements with high spatial resolution. Simulations of centroid calculation in the slope sensor have been performed to evaluate the ultimate accuracy of slope measurement. A performance test of the LTP has also been performed, and a spatial resolution of 0.6 mm has been confirmed.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- SPIE Proceedings
- Accession number :
- edsair.doi...........3b4221575b4ab1680f731c3edf930a41