Enhancement in Reliability of a-InZnO TFT by Fluorine-Doped Polysilsesquioxane Passivation with Spray Pyrolysis

Authors :: Aimi Syairah Safaruddin
Juan Paolo S. Bermundo
Michael Paul A. Jallorina
Mami N. Fujii
Yukiharu Uraoka
Source :: Proceedings of the International Display Workshops. :212
Publication Year :: 2020
Publisher :: International Display Workshops General Incorporated Association, 2020.

Subjects :: Materials science
Passivation
business.industry
Doping
chemistry.chemical_element
General Medicine
Spray pyrolysis
Solution processed
Reliability (semiconductor)
Oxide semiconductor
chemistry
Thin-film transistor
Fluorine
Optoelectronics
business

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