Actinic mask imaging using EUV ptychography microscope

In this study, we carried out actinic EUV mask imaging using EUV ptychography microscope with an updated algorithm. To improve the illumination probe update and the reconstruction quality, we adopted the regularized ptychographic iterative engine (rPIE) with intensity correction. The amplitude and phase of line and space patterns were reconstructed and verified quantitatively. The demonstrated performance of EUV ptychography microscope will be helpful for mask qualification and development of the advanced attenuated phase-shift masks (attPSMs).