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Spectroscopic ellipsometry on lamellar gratings
- Source :
- Applied Surface Science. 244:225-229
- Publication Year :
- 2005
- Publisher :
- Elsevier BV, 2005.
-
Abstract
- Deep lamellar diffraction gratings fabricated by etching a transparent quartz plate are studied using spectroscopic ellipsometry. The rigorous coupled-wave analysis is used to calculate the optical response of the gratings. Three parameters of the rectangular profile are determined by utilizing the least-square method. Detailed investigation of the spectral dependences demonstrates the uniqueness of the solution. Observing the spectral dependences of Wood anomalies suggests that even complicated profiles can be fitted with high authenticity.
- Subjects :
- business.industry
Chemistry
Physics::Optics
General Physics and Astronomy
Surfaces and Interfaces
General Chemistry
Condensed Matter Physics
Surfaces, Coatings and Films
Optics
Etching (microfabrication)
Spectroscopic ellipsometry
Lamellar structure
Anomaly (physics)
business
Optical metrology
Quartz
Diffraction grating
Subjects
Details
- ISSN :
- 01694332
- Volume :
- 244
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........3cceda8ce958f8982b10c3f8f69d7d65