Correlation between Intrinsic Stress Distribution and Crystallographic Defects Density Profile in Czochralski Silicon after CMOS Processing

Subjects

Subjects :

Crystallography
Materials science
Silicon
chemistry
chemistry.chemical_element
General Materials Science
Stress distribution
Condensed Matter Physics
Cmos process
Atomic and Molecular Physics, and Optics

Details

ISSN :

16629779

Database :

OpenAIRE

Journal :

Solid State Phenomena

Accession number :

edsair.doi...........3ce14610a1a80c41697bfad324ddb692

Full Text :

https://doi.org/10.4028/www.scientific.net/ssp.69-70.519