Laser Diagnostics of Submicron VLSI-Structures

MLA

T. Karte, et al. Laser Diagnostics of Submicron VLSI-Structures. Jan. 1984. EBSCOhost, https://doi.org/10.1007/978-3-642-82381-7_58.

APA

T. Karte, R. Kaplan, Josef F. Bille, M. Frieben, A. Plesch, & R. W. Wijnaendts. (1984). Laser Diagnostics of Submicron VLSI-Structures. https://doi.org/10.1007/978-3-642-82381-7_58

Chicago

T. Karte, R. Kaplan, Josef F. Bille, M. Frieben, A. Plesch, and R. W. Wijnaendts. 1984. “Laser Diagnostics of Submicron VLSI-Structures,” January. doi:10.1007/978-3-642-82381-7_58.