Enhancement of AFM images by compensating the hysteresis and creep effect within PZT

In equi-force mode among the AFM scanning modes, the scanning data of a sample is acquired by Z-axis PZT input voltages. But, PZT actuator has a hysteresis and creep between the input voltages and the output displacements. These nonlinearities make a distortion in scanning images. We propose that the creep effect of stack-type PZT shows hysteresis property and classical preisach model can be applied to AFM scanning data according to this property. Finally we will prove that AFM image is improved by the classical preisach model application.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.