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The Influence of Magnetic Field on the Deposition Rate and Ionized Flux Fraction in HiPIMS Discharges
- Source :
- 2020 IEEE International Conference on Plasma Science (ICOPS).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE International Conference on Plasma Science (ICOPS)
- Accession number :
- edsair.doi...........3e4a18f07d75cd302f31e365b19e1ca2
- Full Text :
- https://doi.org/10.1109/icops37625.2020.9717426