Formation and characterization of ZnO : Tm+optical waveguides fabricated by Tm+and O+ion implantation

Planar optical waveguides were formed in ZnO crystal by Tm+ and O+ ion implantation. The distributions of Tm+ in as-implanted and annealed ZnO samples were investigated by the RBS technique. A shift of the Tm+ peak towards the sample surface and out diffusion were observed after thermal treatment and subsequent O+ ion implantation. Waveguide formation was determined after O+ implantation in Tm+-implanted ZnO crystal. By using the prism-coupling method two guided modes were detected. The refractive index profile in the implanted waveguide was reconstructed according to the SRIM and RCM simulation. The RBS/channelling measurements show that the lattice structure of ZnO did not suffer detectable damage after O+ implantation.