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Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates

Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates

Authors :
Yuan Ningyi
Xu Xiaodong
Ding Jianning
Jianhua Qiu
Source :
Materials Research Bulletin. 65:68-72
Publication Year :
2015
Publisher :
Elsevier BV, 2015.

Abstract

In this paper, we report a simple method to form conductive copper lines by scanning a single-beam femtosecond pulse laser on a plastic substrate covered with copper nitride (Cu{sub 3}N) film. The Cu{sub 3}N films were prepared by DC magnetron sputtering in the presence of an Ar + N{sub 2} atmosphere at 100 °C. The influence of the laser power and scanning speed on the formed copper line width, surface features, and morphology was analyzed by means of optical microscopy, X-ray diffraction, non-contact 3D profilometer, and scanning electron microscopy. The experimental results demonstrate that low laser power and low scanning speed favor the formation of uniform and flat Cu lines. After process optimization, copper lines with a width less than 5 μm were obtained, which provides an attractive application prospect in the field of flexible electronic devices.

Details

ISSN :
00255408
Volume :
65
Database :
OpenAIRE
Journal :
Materials Research Bulletin
Accession number :
edsair.doi...........40843425a01598fa01e22c3bcf1d7e2f
Full Text :
https://doi.org/10.1016/j.materresbull.2015.01.029