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Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates
Formation of conductive copper lines by femtosecond laser irradiation of copper nitride film on plastic substrates
- Source :
- Materials Research Bulletin. 65:68-72
- Publication Year :
- 2015
- Publisher :
- Elsevier BV, 2015.
-
Abstract
- In this paper, we report a simple method to form conductive copper lines by scanning a single-beam femtosecond pulse laser on a plastic substrate covered with copper nitride (Cu{sub 3}N) film. The Cu{sub 3}N films were prepared by DC magnetron sputtering in the presence of an Ar + N{sub 2} atmosphere at 100 °C. The influence of the laser power and scanning speed on the formed copper line width, surface features, and morphology was analyzed by means of optical microscopy, X-ray diffraction, non-contact 3D profilometer, and scanning electron microscopy. The experimental results demonstrate that low laser power and low scanning speed favor the formation of uniform and flat Cu lines. After process optimization, copper lines with a width less than 5 μm were obtained, which provides an attractive application prospect in the field of flexible electronic devices.
- Subjects :
- Materials science
Scanning electron microscope
Mechanical Engineering
Analytical chemistry
chemistry.chemical_element
Sputter deposition
Nitride
Condensed Matter Physics
Laser
Copper
law.invention
chemistry
Optical microscope
Mechanics of Materials
law
Femtosecond
General Materials Science
Laser power scaling
Subjects
Details
- ISSN :
- 00255408
- Volume :
- 65
- Database :
- OpenAIRE
- Journal :
- Materials Research Bulletin
- Accession number :
- edsair.doi...........40843425a01598fa01e22c3bcf1d7e2f
- Full Text :
- https://doi.org/10.1016/j.materresbull.2015.01.029