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Ordering of Fine Particles in a Planar Magnetron Plasma
- Source :
- AIP Conference Proceedings.
- Publication Year :
- 2008
- Publisher :
- AIP, 2008.
-
Abstract
- Fine particles injected in a planar magnetron were pushed upward by diffusible plasma, leading to being suspended by the force balance with the gravity and forming three‐dimensional structures on the two‐dimensional structure formed by particle strings.
Details
- ISSN :
- 0094243X
- Database :
- OpenAIRE
- Journal :
- AIP Conference Proceedings
- Accession number :
- edsair.doi...........417c06b0d963f91f15c56a9c45436b0c
- Full Text :
- https://doi.org/10.1063/1.2996957