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High-Quality and Stable Electron Emission Device With Sub-30-nm Aligned Nanogap Arrays
- Source :
- IEEE Transactions on Electron Devices. 64:2364-2368
- Publication Year :
- 2017
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2017.
-
Abstract
- A high-quality and stable electron device of aligned gold nanogap arrays is demonstrated by using a well-controlled method with electron beam lithography and focused ion beam. Sub-30-nm nanogap arrays could be precisely fabricated with reproducibility. Field emission (FE) properties of the nanogaps are directly measured in the vacuum chamber of scanning electron microscopy with a nanomanipulator. Experimental investigation and calculations are carried out to reveal the transition process from the leakage current to the FE. Importantly, the controllable method could allow us to readily construct varying nanospacings. Besides, we also illustrate the independence of emission current on the vacuum degree over a large range, widening the applied range of the devices. These studies clearly demonstrate that electronic devices with sub-30-nm vacuum channel can be readily achieved by coupling varying nanogaps into nanostructures. It may pave the way for exploring the physics in tunneling transport devices, and therefore enable a new generation of high-performance, high-speed and low-cost electronic devices.
- Subjects :
- 010302 applied physics
Materials science
Scanning electron microscope
Nanotechnology
02 engineering and technology
Electron
021001 nanoscience & nanotechnology
01 natural sciences
Focused ion beam
Electronic, Optical and Magnetic Materials
Field electron emission
0103 physical sciences
Vacuum chamber
Electrical and Electronic Engineering
Electron beam-induced deposition
0210 nano-technology
Quantum tunnelling
Electron-beam lithography
Subjects
Details
- ISSN :
- 15579646 and 00189383
- Volume :
- 64
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Electron Devices
- Accession number :
- edsair.doi...........41e61014b775bf542bf89a3596f4f664