Investigation of degradation behavior under negative bias temperature stress in Si/Si0.8Ge0.2 metal-oxide-semiconductor capacitors

Authors :: Ting-Tzu Kuo
Fu-Yuan Jin
Chien-Hung Yeh
Kai-Chun Chang
Kuan-Hsu Chen
Ting-Chang Chang
Yen-Cheng Chang
Yun-Hsuan Lin
Fong-Min Ciou
Wei-Chun Hung
Yu-Shan Lin
Chien-Yu Lin
Source :: Journal of Physics D: Applied Physics. 54:475103
Publication Year :: 2021
Publisher :: IOP Publishing, 2021.

Subjects :: Materials science
Acoustics and Ultrasonics
business.industry
Negative bias
Condensed Matter Physics
Temperature stress
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
Metal
Capacitor
Oxide semiconductor
law
visual_art
visual_art.visual_art_medium
Degradation (geology)
Optoelectronics
business

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