Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films

Lead zirconate titanate (PZT) films with composition near the morphotropic phase boundary were fabricated on Pt(111)/Ti/SiO 2 /Si(100) using sol-gel method, and the pyrolysis temperature effects on the preferential orientation and ferroelectric properties of PZT films were investigated. It has been found that the PZT films pyrolyzed at 450 °C and then annealed at 650 °C shown a dominated (100) orientation, whereas the pyrolysis treatment at lower or higher temperatures favored the (111) orientation. Different pyrolysis temperatures also lead to differences in electrical properties, including dielectric constant, polarization values, leakage current and fatigue behavior.