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Phonon Diffraction Limited Performance of Fabry-Pérot Cavities in Piezoelectric epi – Hbars
- Source :
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
-
Abstract
- We report on phonon diffraction limited performance of GaN/AlN/NbN/SiC epitaxial HBARs (epi-HBARs) that act as Fabry-Perot acoustic cavities with parallel reflectors. In a series of devices with varying transducer diameter (∅), we find that the smallest epi-HBARs (∅=22.5 μm on a 350 μm thick substrate) are indeed limited by diffraction, yet achieve f×Q ≈1012 Hz at 7.2 K. Near the diffraction limit, f×Q≈ 1014 Hz for ∅ >50 μm, and for larger devices that are not diffraction limited, f×Q≈ 2×1016 Hz. We discuss the practical tradeoffs involved in using such high performance electrically transduced epi-HBARs compared to confocal HBARs with an engineered curved surface that are popular for phonon-qubit coupling in quantum acoustodynamic (QAD) systems.
- Subjects :
- Diffraction
Coupling
Materials science
business.industry
Phonon
02 engineering and technology
Substrate (electronics)
021001 nanoscience & nanotechnology
Epitaxy
01 natural sciences
Piezoelectricity
Transducer
0103 physical sciences
Optoelectronics
010306 general physics
0210 nano-technology
business
Fabry–Pérot interferometer
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........447fb85f09c2579755ea2ea163581978