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Electro-Static Micro Actuator Technology for Moving Lens of Ultra Small Camera of Mobile Equipment
- Source :
- IEEJ Transactions on Sensors and Micromachines. 123:49-55
- Publication Year :
- 2003
- Publisher :
- Institute of Electrical Engineers of Japan (IEE Japan), 2003.
Details
- ISSN :
- 13475525 and 13418939
- Volume :
- 123
- Database :
- OpenAIRE
- Journal :
- IEEJ Transactions on Sensors and Micromachines
- Accession number :
- edsair.doi...........454b6c4e5b68390134031660ca140e4d
- Full Text :
- https://doi.org/10.1541/ieejsmas.123.49