Preparation of Large Freestanding GaN Substrates by Hydride Vapor Phase Epitaxy Using GaAs as a Starting Substrate

A freestanding GaN substrate over 2 inches in size was successfully prepared for the first time by hydride vapor phase epitaxy (HVPE) using GaAs as a starting substrate. In the experiment, a GaAs (111)A substrate with a SiO2 mask pattern on its surface was used. A thick GaN layer was grown on the GaAs substrate at 1030°C through the openings in the SiO2 mask. By dissolving the GaAs substrate in aqua regia, a freestanding GaN substrate about 500 µm thick was obtained. The full-width at half maximum (FWHM) in the ω-mode X-ray diffraction (XRD) profile of GaN (0002) plane was 106 arcsec. The dislocation density of the GaN substrate obtained was determined to be as low as 2×105 cm-2 by plan-view transmission electron microscopy (TEM). Hall measurements revealed the n-type conductivity of the GaN substrate with typical carrier concentration and carrier mobility of 5×1018 cm-3 and 170 cm2·V-1·s-1, respectively.