Ellipsometer Equipped with Multiple Mirrors for Element-selective Soft X-ray Experiments

Authors :: Shigeki Owada
Junji Meikaku
Thomas Bouillaud
Iwao Matsuda
Makina Yabashi
Yuka Kosegawa
M. Araki
Souliman El Moussaoui
Kensuke Tono
Paul Manset
Jun Miyawaki
Yuya Kubota
Source :: e-Journal of Surface Science and Nanotechnology. 18:231-234
Publication Year :: 2020
Publisher :: Surface Science Society Japan, 2020.

Subjects :: Soft x ray
Materials science
business.industry
Bioengineering
Surfaces and Interfaces
Soft X-rays
Condensed Matter Physics
Surfaces, Coatings and Films
Optics
Mechanics of Materials
Ellipsometry
Extreme ultraviolet
business
Biotechnology

Tools