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Deformation Direction and Curvature Control of Multilayer Thin Films Produced by Sputtering

Authors :
Mori Osamu
Satoh Yasutaka
Ikeda Ryota
Sugawara Yoshiki
Source :
TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, AEROSPACE TECHNOLOGY JAPAN. 17:603-610
Publication Year :
2019
Publisher :
Japan Society for Aeronautical and Space Sciences, 2019.

Subjects

Subjects :
Materials science
Sputtering
Deformation (meteorology)
Thin film
Composite material
Curvature

Details

ISSN :
18840485
Volume :
17
Database :
OpenAIRE
Journal :
TRANSACTIONS OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES, AEROSPACE TECHNOLOGY JAPAN
Accession number :
edsair.doi...........47afcd58e1ad969699c617e2af61de73
Full Text :
https://doi.org/10.2322/tastj.17.603
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