The composition analysis of YBa 2 Cu 3 O 7-δ or PrBa 2 Cu 3 O 7-δ thin films and (YBa 2 Cu 3 O 7-δ /PrBa 2 Cu 3 O 7-δ ) n heterostructures prepared by CVD

Some YBa2Cu3O7-δ films and heterostructures prepared by Chemical Vapor Deposition (CVD) were analyzed in our laboratories by EPMA-EDX or WDX, RBS, SNMS and AES. It was found that in some cases the results of composition analysis can significantly deviate from each other. At least two main reasons for these deviations exist: the different lateral resolution and the application of different reference samples for the calibration.