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Structure of the Al–GaP(110) and Al–InP(110) interfaces

Authors :
C. R. Bonapace
Antoine Kahn
A. Paton
Charles B. Duke
Source :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 1:613
Publication Year :
1983
Publisher :
American Vacuum Society, 1983.

Abstract

The Al–GaP(110) and Al–InP(110) interfaces are characterized with low energy electron diffraction and Auger electron spectroscopy. Both interfaces are reactive, i.e., the replacement of the cation by Al is thermodynamically favorable. However, Al evaporated on the room temperature substrates has a high surface mobility and forms metallic islands which leave the atomic structure of the uncovered semiconductor areas unperturbed. Limited Al–substrate reaction can be detected at room temperature. Moderate annealing triggers a large scale Al‐cation replacement reaction and leads to the formation of AlP layers. The crystalline quality of the AlP layers is good for Al on GaP (0.01% lattice mismatch between AlP and InP) and poor for Al on InP (7% lattice mismatch between AlP and InP). The atomic geometry of AlP(110) is analyzed with multiple scattering LEED computation. A best fit structure is obtained which is consistent with the correlation recently obtained between atomic structure and atomic size on (110) semiconductor compound surfaces.

Details

ISSN :
0734211X
Volume :
1
Database :
OpenAIRE
Journal :
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Accession number :
edsair.doi...........49e2386dec687738e375272a6b0c83df
Full Text :
https://doi.org/10.1116/1.582609