Wavelength and Energy Scaling of Deposited Energy Density during Microstructuring of Transparent Materials

Femtosecond microprocessing is of particular interest for various fields of science and technology ranging from precise cell surgery to industrial fabrication of opto-electronic devices [1,2]. The dependence of deposited energy density (DED) on laser parameters provides unique information about the breakdown initiation and dominant mechanisms. Detailed knowledge of the parameter dependence of DED is essential for controlled formation of micro- and nano-structures with predictable morphologies.