Back to Search Start Over

Ultra-low temperature anodic bonding of silicon and borosilicate glass

Authors :
P. Knapkiewicz
Source :
Semiconductor Science and Technology. 34:035005
Publication Year :
2019
Publisher :
IOP Publishing, 2019.

Subjects

Subjects :
Materials science
Silicon
chemistry
Borosilicate glass
Anodic bonding
Materials Chemistry
chemistry.chemical_element
Electrical and Electronic Engineering
Composite material
Condensed Matter Physics
Electronic, Optical and Magnetic Materials

Details

ISSN :
13616641 and 02681242
Volume :
34
Database :
OpenAIRE
Journal :
Semiconductor Science and Technology
Accession number :
edsair.doi...........4a48e7633ba5e875a843139e40a94307

Tools

Authors Abstract Subjects Details