Gas-based spectral filter for mitigating 10.6 μm radiation in CO 2 laser produced plasma extreme ultraviolet sources

MLA

Chimaobi Mbanaso, et al. “Gas-Based Spectral Filter for Mitigating 10.6 Μm Radiation in CO 2 Laser Produced Plasma Extreme Ultraviolet Sources.” SPIE Proceedings, Mar. 2011. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........4c3cc346791d985f203c71531c40b132&authtype=sso&custid=ns315887.

APA

Chimaobi Mbanaso, Gregory Denbeaux, Frank Goodwin, Horace Bull, Ady Hershcovitch, & Alin Antohe. (2011). Gas-based spectral filter for mitigating 10.6 μm radiation in CO 2 laser produced plasma extreme ultraviolet sources. SPIE Proceedings.

Chicago

Chimaobi Mbanaso, Gregory Denbeaux, Frank Goodwin, Horace Bull, Ady Hershcovitch, and Alin Antohe. 2011. “Gas-Based Spectral Filter for Mitigating 10.6 Μm Radiation in CO 2 Laser Produced Plasma Extreme Ultraviolet Sources.” SPIE Proceedings, March. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........4c3cc346791d985f203c71531c40b132&authtype=sso&custid=ns315887.