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Aberration Corrector Tuning with Machine-Learning-Based Emittance Measurements and Bayesian Optimization

Authors :
Cameron Duncan
Auralee Edelen
Adi Hanuka
Zhaslan Baraissov
Chenyu Zhang
Jared Maxson
David A. Muller
Source :
Microscopy and Microanalysis. 27:810-812
Publication Year :
2021
Publisher :
Oxford University Press (OUP), 2021.

Subjects

Subjects :
Computer science
Bayesian optimization
Thermal emittance
Instrumentation
Algorithm

Details

ISSN :
14358115 and 14319276
Volume :
27
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........4c70e8bf29501823713286c5d22fc692
Full Text :
https://doi.org/10.1017/s1431927621003214
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