Electron-beam-induced conduction in a ruthenium carbonyl nanoparticle polymer

A polymer composed of ruthenium carbonyl and of the formula [Ru6C(CO)15Ph2PCCPPh2]n has been synthesized. It is found to behave as a negative electron-beam resist with a sensitivity of 400 C/m2. Upon exposure to the electron beam, the electrical conductivity of the patterned films is found to vary over seven orders of magnitude according to a power-law dependence on dose. Temperature dependence of the conductivity is studied, and the conduction is attributed to variable-range hopping between ruthenium superclusters in two dimensions.