Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application

This paper presented the design, fabrication, and characterization of force transmitting element for MEMS tri-axial force sensor application. The transmitting element consists of two main parts: integrated silicon rod and mechanical stopper. The advantages of the design are the simplicity of fabrication process, the ability to detect force in all direction and to protect the sensing element from excessive force, thus increase the robustness of the devices.