10.4: Improvement of Stability on a-IGZO LCD

Authors :: Wei Yang
Seong Yeol Yoo
Guang Liang Shang
Chun Wei Wu
Jian Chen
Ce Ning
Doo Hee Lee
Woo-Bong Lee
Guang Cai Yuan
Jian Wei Yu
Ke Wang
Xiang Liu
Yubo Xu
Chien Hung Liu
Source :: SID Symposium Digest of Technical Papers. 44:97-99
Publication Year :: 2013
Publisher :: Wiley, 2013.
Abstract: We have developed 10-inch 300PPI and 65-inch ultra high-definition FFS LCD using amorphous In-Ga-Zn-O(IGZO) TFT. After improvement of TFT's process and structure, the TFT performance is good enough for TFT-LCD. In this report, we discuss our IGZO TFT process, uniformity and reliability.